DocumentCode :
2663829
Title :
Monolithic Bi-directional Linear Microactuator for Light Beam Manipulation
Author :
Cheng, Hao-Der ; Hsiao, Sheng-Yi ; Wu, Mingching ; Fang, Weileun
Author_Institution :
Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu
fYear :
2006
fDate :
21-24 Aug. 2006
Firstpage :
122
Lastpage :
123
Abstract :
This study monolithically fabricates a bi-directional linear microactuator on SOI wafer. The actuator is driven by both thermal and magnetic means. This actuator provides plusmn44 mum and plusmn53 mum displacements in the in-plane and out-of-plane directions, respectively
Keywords :
micro-optomechanical devices; microactuators; optical fabrication; silicon-on-insulator; SOI wafer; Si-SiO2; light beam manipulation; monolithic bi-directional linear microactuator; Bidirectional control; Coils; Displays; Focusing; Hydraulic actuators; Lenses; Microactuators; Microoptics; Optical arrays; Optical devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
Type :
conf
DOI :
10.1109/OMEMS.2006.1708295
Filename :
1708295
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2663829
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