Title :
Optical Switch using Thermo-Optic Effect of Micromachined Silicon Hemispheres
Author :
Zhong, T. ; Zhang, X.M. ; Li, J. ; Liu, A.Q.
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ.
Abstract :
This paper reports a new optical switching design using a pair of micromachined silicon hemispheres by means of thermo-optic effect (TOE) and total internal reflection (TIR). This design is advantageous over conventional micromechanical switches for absence of mechanical movements and thus high reliability
Keywords :
micro-optomechanical devices; microswitches; optical switches; reliability; thermo-optical effects; mechanical movement; micromachined silicon hemispheres; micromechanical switches; optical switch; reliability; thermo-optic effect; total internal reflection; Heating; Optical reflection; Optical refraction; Optical sensors; Optical switches; Optical variables control; Refractive index; Silicon; Temperature sensors; Thermooptic effects;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708297
