Title :
Micromirror Array of Monocrystalline Silicon
Author :
Bakke, Thor ; Völker, Benjamin ; Friedrichs, Martin ; Rudloff, Dirk
Author_Institution :
Fraunhofer Inst. for Photonic Microsyst., Dresden
Abstract :
A 240times281 array of micromirrors made of monocrystalline silicon is presented. The absence of stress gradients makes it possible to achieve mirrors of unsurpassed planarity and the high elasticity of silicon allows creep free actuation
Keywords :
creep; elasticity; elemental semiconductors; micromirrors; silicon; creep free actuation; elasticity; micromirror array; monocrystalline silicon; stress gradients; unsurpassed planarity; CMOS process; Electrodes; Micromirrors; Mirrors; Optical modulation; Polymers; Reflectivity; Silicon; Stress; Wafer bonding;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708298
