Title :
Extended Tuning Range Fabry-Perot Etalon with Doubly-Supported Beam Actuators
Author :
Milne, J. ; Dell, J. ; Keating, A. ; Faraone, L.
Author_Institution :
Microelectron. Res. Group, Western Australia Univ., Perth, WA
Abstract :
A MEMS-based Fabry-Perot etalon that uses doubly-supported beams for actuation is shown to have a wider tuning range than conventional designs using parallel plates
Keywords :
Fabry-Perot interferometers; electrostatic actuators; micro-optomechanical devices; optical design techniques; optical filters; optical tuning; MEMS-based Fabry-Perot etalon; doubly-supported beam actuators; electrostatic actuation; extended tuning range; microelectromechanical systems; parallel plates; tunable filter; Actuators; Capacitive sensors; Electrodes; Fabry-Perot; Filters; Infrared detectors; Microelectronics; Micromechanical devices; Mirrors; Strain control;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708301
