Title :
Individually Tunable Silicon Bragg Reflectors
Author :
Koné, Fatou Binetou ; Peter, Yves-Alain
Author_Institution :
Ecole Polytech. de Montreal, Que.
Abstract :
We introduce an innovative design of a tunable optical filter. The design constitutes of a vertical Bragg grating microfabricated in the device layer of a silicon-on-insulator (SOI) wafer and whose silicon walls can be independently operated to select the desired response of the filter. The design concept and detailed microfabrication process are presented
Keywords :
Bragg gratings; distributed Bragg reflectors; micro-optics; optical design techniques; optical fabrication; optical filters; optical tuning; silicon-on-insulator; microfabrication process; silicon walls; silicon-on-insulator wafer; tunable optical filter; tunable silicon Bragg reflectors; vertical Bragg gratings; Etching; Laser tuning; Lithography; Mirrors; Optical design; Optical fiber devices; Optical fibers; Optical filters; Silicon; Tunable circuits and devices;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708302
