DocumentCode :
2665155
Title :
Higher density using diffusion patterned vias and fine line printing
Author :
Bender, David K. ; Ferreira, Amy M.
Author_Institution :
C-MAC of America, West Palm Beach, FL, USA
fYear :
1993
fDate :
4-6 Oct 1993
Firstpage :
471
Lastpage :
476
Abstract :
Design guidelines, process steps and test results from fabrication of two 40-mm multichip module (MCM)-Cs using the latest thick materials and printing techniques are discussed. Two two LIC (line interface controller) modules are designed with two large ASICs (plus memory) and prototyped using thick film gold conductors with 3 mil line/space and 6 mil via criteria. The second prototype of the LIC module utilizes silver conductors at 5 mil line and gap to further reduce cost. The second module design uses more bare die (field programmable gate arrays and memory) for a much higher interconnect density but still uses existing design guidelines. It is believed that 4 mil vias can be achieved in production and will be developed for future designs require higher density. Diffusion patterning allows a 50% reduction (4-6 mil) in via size versus traditional printed vias (10-20 mil)
Keywords :
application specific integrated circuits; hybrid integrated circuits; integrated circuit interconnections; integrated circuit packaging; integrated circuit reliability; multichip modules; 4 to 6 mm; 40 mm; Ag conductors; Al2O3 ceramic substrate; MCM-C; acid-base reaction; design guidelines; diffusion patterned vias; fabrication; field programmable gate arrays; fine line printing; higher interconnect density; large ASICs; line interface controller modules; memory; more bare die; multichip module; process steps; reliability testing; screen printing; thick film Au conductors; Conducting materials; Fabrication; Guidelines; Materials testing; Multichip modules; Printing; Process design; Prototypes; Thick films; Thickness control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993, Fifteenth IEEE/CHMT International
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-1424-7
Type :
conf
DOI :
10.1109/IEMT.1993.398162
Filename :
398162
Link To Document :
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