Title :
Monolithic quartz structure vibrating beam accelerometer (VBA)
Author :
Albert, William C.
Author_Institution :
Crystal Gage Inc., Boonton, NJ, USA
Abstract :
This paper describes an accelerometer for which the vibrating beam sensor, the vibration isolation system, the proof mass, the proof mass suspension system, and the mounting means are all machined from a single rectangular quartz crystal blank. As such, this sensor represents a significant advancement in combining the sensor art with the quartz crystal resonator art. The design uses the well-known force-frequency modulation effect of a vibrating beam in axial tension or compression
Keywords :
accelerometers; crystal resonators; integrated circuit packaging; micromechanical resonators; monolithic integrated circuits; SiO2; axial tension; compression; flexure drive; force-frequency modulation effect; monolithic quartz structure vibrating beam accelerometer; packaging; proof mass suspension; quartz crystal resonator; vibrating beam; vibrating beam sensor; vibration isolation; Accelerometers; Art; Circuits; Electrodes; Machining; Oscillators; Packaging machines; Stress; Structural beams; Temperature sensors;
Conference_Titel :
Frequency Control Symposium, 1994. 48th., Proceedings of the 1994 IEEE International
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1945-1
DOI :
10.1109/FREQ.1994.398303
