Title :
The Electrode Sheath Width In RF Discharges: A Coinparison Of Analytic Models And Experimental Measurements
Author :
Piejak, R.B. ; Godyak, V.A. ; Alexandrovich, B.M.
Author_Institution :
GTE Laboratories Inc.
Keywords :
Electrodes; Plasma density; Plasma materials processing; Plasma measurements; Plasma properties; Plasma sheaths; Predictive models; Radio frequency; Superconducting magnets; Surface discharges;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697981
