DocumentCode
2671971
Title
Unique electrical characterization and in-line monitoring of nano-tipped defects in metal-insulator-metal capacitors
Author
Sheng, Lieyi ; Snyder, Eric ; Doub, Jason ; Berti, Valerie ; Kriner, Levi ; Glines, Eddie
Author_Institution
ON Semicond., Pocatello, ID, USA
fYear
2009
fDate
26-30 April 2009
Firstpage
808
Lastpage
809
Abstract
The unique characteristics of defective MIM capacitors under nano-ampere current injection and passive voltage contrast have verified the field enhancement and charge accumulation along nanotipped defects. The improved process which reduces the risk of nanowhiskers is confirmed by in-line optical monitoring in production.
Keywords
MIM devices; capacitors; condition monitoring; nanotechnology; charge accumulation; field enhancement; in-line optical monitoring; metal-insulator-metal capacitors; nanoampere current injection; nanotipped defects; nanowhisker; passive voltage; unique electrical characterization; Dielectrics; Electron emission; MIM capacitors; Metal-insulator structures; Monitoring; Optical saturation; Pattern analysis; Production; Scanning electron microscopy; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 2009 IEEE International
Conference_Location
Montreal, QC
ISSN
1541-7026
Print_ISBN
978-1-4244-2888-5
Electronic_ISBN
1541-7026
Type
conf
DOI
10.1109/IRPS.2009.5173355
Filename
5173355
Link To Document