Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WA-BRG)

Author

Jong-Kwan Woo ; Jae Yoong Cho ; Boyd, Christopher ; Najafi, Khalil

Author_Institution

Center for Wireless Integrated MicroSensing & Syst. (WIMS), Univ. of Michigan, Ann Arbor, MI, USA

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

20

Lastpage

23

Abstract

We present the fused-silica micromachined birdbath resonator gyroscope (μ-BRG) operating in the whole-angle (WA) mode. The key advantages of the whole angle mode operation is rotation angle measurement, large bandwidth, and full-scale range which is needed in detecting the motion of fast-moving objects. The μ-BRG is made with fused silica using a micro blow-torching process and has n = 2 wineglass modes at 10.46 kHz with a small frequency mismatch (Δf = 10 Hz) and a decay time (τ) of 2.2s. The WA-BRG achieves a stable angular gain (A_g) and a large full scale range (700°/s).

Keywords

angular measurement; gyroscopes; micromechanical resonators; silicon compounds; μ-BRG; SiO₂; WA-BRG; frequency 10.46 kHz; microblow-torching; micromachined birdbath resonator gyroscope; micromachined fused-silica; rotation angle measurement; whole-angle-mode; wineglass modes; Damping; Electrodes; Fabrication; Gyroscopes; Resonant frequency; Silicon; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765563

Filename

6765563