Title :
Grooved AT-cut quartz plate
Author_Institution :
Dept. of Electron., Tokyo Metropolitan Coll. of Aeronaut. Eng., Japan
Abstract :
The effect of grooves on the coupled vibrations of AT-cut quartz plates is analyzed by using two-dimensional equations of motion. I calculate the frequency spectra and vibrational patterns and investigate the optimal design parameters (i.e. depth, width, and position of grooves)
Keywords :
Q-factor; crystal resonators; elastic constants; frequency stability; vibrations; SiO2; coupled vibrations; elastic constants; energy trapping; frequency spectra; groove depth; groove position; groove width; grooved AT-cut quartz plate; grooves effect; guided waves; minimum frequency difference; mode decoupling; model; optimal design parameters; thickness shear mode; two-dimensional equations of motion; vibrational patterns; Aerospace engineering; Boundary conditions; Educational institutions; Equations; Etching; Frequency; Lithography; Motion analysis; Stress; Surface waves;
Conference_Titel :
Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
Conference_Location :
Kansas City, MO
Print_ISBN :
0-7803-5838-4
DOI :
10.1109/FREQ.2000.887392
