DocumentCode :
2680641
Title :
Metal etcher characterization using flash memory cells as charge sensors
Author :
Alba, S. ; Colognese, A. ; Ghio, E.
Author_Institution :
SGS-THOUSON Microelectronics
fYear :
1997
fDate :
16-19 March 1997
Firstpage :
146
Lastpage :
147
Keywords :
Etching; Flash memory cells; Inorganic materials; Metallization; Microelectronics; Plasma applications; Plasma sources; Radio frequency; Sensor phenomena and characterization; Threshold voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
ISSN :
1266-0167
Type :
conf
DOI :
10.1109/MAM.1998.887550
Filename :
887550
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2680641
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