مرکز منطقه ای اطلاع رساني علوم و فناوري - Size dependent phenomena during the formation of Gd and Fe silicide thin films

DocumentCode :

2680962

Title :

Size dependent phenomena during the formation of Gd and Fe silicide thin films

Author :

Molnár, G.L. ; Petõ, G. ; Horvath, Z.E. ; Zsoldos, E. ; Khánh, N.Q.

Author_Institution :

KFKI Research Institute for Materials Science

fYear :

1997

fDate :

16-19 March 1997

Firstpage :

196

Lastpage :

197

Keywords :

Annealing; Iron; Semiconductor films; Semiconductor materials; Semiconductor thin films; Silicides; Silicon; Solids; Substrates; Transistors;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location :

Villard de Lans, France

ISSN :

1266-0167

Type :

conf

DOI :

10.1109/MAM.1998.887572

Filename :

887572

Link To Document :