DocumentCode
2685286
Title
Millimeter Wave Silicon Device and Integrated Circuit Technology
Author
Stabile, P.J. ; Rosen, A. ; Janton, W.M. ; Gombar, A. ; Kolan, M.
fYear
1984
fDate
May 30 1984-June 1 1984
Firstpage
448
Lastpage
450
Abstract
Silicon millimeter wave integrated circuit (SIMMWIC) technology has been developed utilizing novel fabrication techniques. These techniques have been applied to IMPATT and PIN diode fabrication schemes, the results of which are presented.
Keywords
Annealing; Diodes; Integrated circuit technology; Ion implantation; Metallization; Millimeter wave devices; Millimeter wave integrated circuits; Millimeter wave technology; Optical pulses; Silicon devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1984 IEEE MTT-S International
Conference_Location
San Francisco, CA, USA
ISSN
0149-645X
Type
conf
DOI
10.1109/MWSYM.1984.1131880
Filename
1131880
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