Performance evaluation of a new novel planar interdigital sensors

Author

Syaifudin, A. R Mohd ; Yu, P.L. ; Mukhopadhyay, S.C. ; Haji-Sheikh, Michael J. ; Vanderford, J.

Author_Institution

Sch. of Eng. & Adv. Technol., Massey Univ., Palmerston North, New Zealand

fYear

2010

fDate

3-6 May 2010

Firstpage

731

Lastpage

736

Abstract

A new novel planar interdigital sensor has been fabricated to have better sensing performance. The new sensors were fabricated using latest technology in sensor fabrication. The new sensors have four different layers which consist of conductor 1 for main trace and interdigitated capacitor trace, conductor 2 for thicker pads for series mount of resistor and other connections, dielectric dams for the surface mount resistor and a ground plane. Result from the experiments have shown that new novel sensor have better stability in term of amplitude and phase angle, very small resistive part and better shielding to reduce noise. It is also shown that new sensor has stable sensitivity measurement at different temperature.

Keywords

dielectric devices; interdigital transducers; surface mount technology; interdigitated capacitor trace; performance evaluation; planar interdigital sensors; resistors; stable sensitivity measurement; Capacitive sensors; Capacitors; Conductors; Dielectrics; Fabrication; Noise reduction; Resistors; Stability; Temperature measurement; Temperature sensors; Interdigital; phase angle; reactive part; resistive part; sensitivity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference (I2MTC), 2010 IEEE

Conference_Location

Austin, TX

ISSN

1091-5281

Print_ISBN

978-1-4244-2832-8

Electronic_ISBN

1091-5281

Type

conf

DOI

10.1109/IMTC.2010.5488245

Filename

5488245