High performance Flash memory for 65 nm embedded automotive application

Author

Piazza, Fausto ; Boccaccio, Christian ; Bruyere, Sylvie ; Cea, Riccardo ; Clark, Bill ; Degors, Nicolas ; Collins, Christopher ; Gandolfo, Anna ; Gilardini, Annalisa ; Gomiero, Enrico ; Mans, Pier Marie ; Mastracchio, Gianfranco ; Pacelli, David ; Planes,

Author_Institution

STMicroelectronics, Crolles, France

fYear

2010

fDate

16-19 May 2010

Firstpage

1

Lastpage

3

Abstract

In this paper the results obtained for a new process flow that integrates a high performance flash cell for automotive application with a state of the art 65 nm CMOS have been presented. Despite the several specific process steps introduced for the first time on embedded technologies, the MOS performances have not been impacted by the integration of the flash cell and the related HV MOS and the results obtained on a 4 Mbit flash array are very promising.

Keywords

CMOS memory circuits; automotive electronics; flash memories; CMOS technology; HV MOS; embedded automotive application; embedded technology; flash array; high performance flash memory; size 65 nm; storage capacity 4 Mbit; Automotive applications; CMOS process; CMOS technology; Dielectric substrates; Electronics industry; Flash memory; Implants; Nonvolatile memory; Silicon; Threshold voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Memory Workshop (IMW), 2010 IEEE International

Conference_Location

Seoul

Print_ISBN

978-1-4244-6719-8

Electronic_ISBN

978-1-4244-7668-8

Type

conf

DOI

10.1109/IMW.2010.5488312

Filename

5488312