Title :
Using spectroellipsometry to examine multilayer gratings for sensors and photodetectors
Author :
Dmitruk, N.L. ; Mayeva, O.I. ; Mamykin, S.V. ; Yastrubchak, O.B. ; Klopfleisch, M.
Author_Institution :
Inst. for Phys. of Semicond., Acad. of Sci., Kiev, Ukraine
Abstract :
A characterization program for multilayer gratings for sensors and photodetector applications have been designed and an examination of the multilayer gratings has been performed
Keywords :
diffraction gratings; ellipsometry; optical multilayers; optical sensors; photodetectors; characterization program; multilayer gratings; photodetectors; sensors; spectroellipsometry; Artificial intelligence; Gold; Gratings; Holographic optical components; Holography; Nonhomogeneous media; Optical films; Optical sensors; Photodetectors; Plasmons;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.889117
