DocumentCode
2693714
Title
Laser-based materials growth and microfabrication
Author
Vainos, Nikcos A.
Author_Institution
Inst. of Electron. Structure & Laser, Foundation for Res. & Technol.-Hellas, Heraklion, Greece
Volume
2
fYear
2000
fDate
2000
Firstpage
421
Abstract
The ablation of materials by intense laser pulses enables a range of direct materials processing methods. Pulsed laser deposition achieves even epitaxial growth of complex compounds or precisely tuned novel structures. The spatially selective ablation process results in direct materials microetching and microdeposition offering novel, low-cost alternative microfabrication tools
Keywords
laser ablation; laser beam etching; micromachining; pulsed laser deposition; epitaxial growth; intense laser pulse ablation; material growth; microdeposition; microetching; microfabrication; pulsed laser deposition; Conducting materials; Electromagnetic wave absorption; Free electron lasers; Laser ablation; Optical materials; Optical pulses; Plasma density; Pulsed laser deposition; Rapid thermal processing; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location
Sinaia
Print_ISBN
0-7803-5885-6
Type
conf
DOI
10.1109/SMICND.2000.889123
Filename
889123
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