Parametric nonlinear lumped element model for circular CMUTs in collapsed mode

Author

Aydogdu, Elif ; Ozgurluk, Alper ; Atalar, Abdullah ; KoÌˆymen, Hayrettin

Author_Institution

Electr. & Electron. Eng. Dept., Bilkent Univ., Ankara, Turkey

Volume

61

Issue

1

fYear

2014

fDate

Jan-14

Firstpage

173

Lastpage

181

Abstract

We present a parametric equivalent circuit model for a circular CMUT in collapsed mode. First, we calculate the collapsed membrane deflection, utilizing the exact electrical force distribution in the analytical formulation of membrane deflection. Then we develop a lumped element model of collapsed membrane operation. The radiation impedance for collapsed mode is also included in the model. The model is merged with the uncollapsed mode model to obtain a simulation tool that handles all CMUT behavior, in transmit or receive. Large- and small-signal operation of a single CMUT can be fully simulated for any excitation regime. The results are in good agreement with FEM simulations.

Keywords

finite element analysis; ultrasonic transducers; FEM simulations; analytical formulation; capacitive micromachined ultrasonic transducers; circular CMUT; collapsed mode; electrical force distribution; membrane deflection; parametric nonlinear lumped element model; radiation impedance; Adaptation models; Approximation methods; Capacitance; Force; Insulators; Integrated circuit modeling; Lead;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2014.6689785

Filename

6689785