DocumentCode :
269616
Title :
Journal of Microelectromechanical Systems publication information
Volume :
22
Issue :
2
fYear :
2013
fDate :
Apr-13
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2013.2254380
Filename :
6490363
Link To Document :
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