Title :
Large linear micromirror array for UV femtosecond laser pulse shaping
Author :
Waldis, Severin ; Weber, Stefan M. ; Noell, Wilfried ; Extermann, Jérôme ; Kiselev, Denis ; Bonacina, Luigi ; Wolf, Jean-Pierre ; De Rooij, Nico F.
Author_Institution :
Inst. of Micro Technol., Univ. de Neuchatel, Neuchatel
Abstract :
We are fabricating a bulk-micromachined micromirror device for laser pulse shaping applications on femtosecond time scales. An array of micromirrors is used to individually retard or diminish certain laser frequencies spanning from the UV to the near-infrared. The individual mirrors are fixed by two springs on either side and can be tilted (amplitude modulation) or moved out-of plane (phase modulation) using asymmetrical or symmetrical vertical comb drives, respectively.
Keywords :
amplitude modulation; high-speed optical techniques; micromirrors; optical modulation; optical pulse shaping; phase modulation; UV femtosecond laser pulse shaping; amplitude modulation; asymmetrical vertical comb drives; laser frequencies; linear micromirror array; phase modulation; symmetrical vertical comb drives; Amplitude modulation; Micromirrors; Mirrors; Optical arrays; Optical pulse shaping; Pistons; Pulse modulation; Pulse shaping methods; Springs; Ultrafast optics; SOI; UV-NIR femtosecond laser pulse shaping; biomolecules; micromirror; timed DRIE; vertical comb drive;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607817
