Performance improvement of a two-axis radial-vertical-combdrive scanner by using a symmetric spring design

Author

Hsieh, Tien-liang ; Chang, Yao-tien ; Chiou, Sheng-jie ; Tsai, Jui-che ; Hah, Dooyoung ; Wu, Ming C.

Author_Institution

Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei

fYear

2008

fDate

11-14 Aug. 2008

Firstpage

108

Lastpage

109

Abstract

A symmetric cross-bar spring structure is employed to improve the performance of a two-axis gimbal-less micromirror driven by radial vertical combdrive actuators. The actuators are hidden underneath the mirror to minimize the device form factor. The device is fabricated by the SUMMiT-V surface micromachining process. The entire improved cross-bar spring structure is made of the same layer with a 1-mum thickness and the torsion springs are shortened to suppress the lateral instability. The mechanical rotation angles are plusmn5.33deg (50.7 V) and plusmn6.04deg (52.8 V) for rotation about the x- and y-axes, respectively.

Keywords

microactuators; micromachining; micromirrors; optical design techniques; optical scanners; SUMMiT-V surface micromachining process; gimbal-less micromirror; mechanical rotation angles; radial vertical combdrive actuators; radial vertical combdrive scanner; size 1 mum; symmetric cross-bar spring structure; symmetric spring design; torsion springs; Actuators; Micromachining; Micromechanical devices; Micromirrors; Mirrors; Optical interferometry; Optical microscopy; Photonics; Springs; Two dimensional displays; Symmetric spring; radial comb-drive actuators; small form factor; surface micromachining; two-axis scanner;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Conference_Location

Freiburg

Print_ISBN

978-1-4244-1917-3

Electronic_ISBN

978-1-4244-1918-0

Type

conf

DOI

10.1109/OMEMS.2008.4607852

Filename

4607852