Title :
Temperature dependent electrical characteristics of silicide/silicon junctions
Author :
Horváth, Zs J. ; Donoval, D. ; Petö, G. ; Molnár, G. ; Van Tuyen, Vo
Author_Institution :
Hungarian Academy of Sciences
Keywords :
Annealing; Conductivity; Electric variables; Schottky diodes; Silicides; Silicon; Temperature dependence; Temperature distribution; Temperature measurement; Thermionic emission;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Print_ISBN :
0-7803-5939-9
DOI :
10.1109/ASDAM.2000.889448