Silicon Nitride Horizontal Air-Slot Microdisk Resonators With a Nanocrystal Si Emitting Layer

Author

ShinYoung Lee ; Shin, J.H.

Author_Institution

Dept. of Phys., KAIST, Daejeon, South Korea

Volume

25

Issue

11

fYear

2013

fDate

1-Jun-13

Firstpage

1020

Lastpage

1023

Abstract

Silicon nitride (SiN) microdisk resonators with a 40-nm horizontal air slot and a nanocrystal Si (nc-Si) emitting top layer are investigated. The whole structure is fabricated using only a single deposition and lithography step, with the light-emitting layer self-aligned to excite the slot-mode within the air slot. The nc-si are excited via top-pumping using a UV laser diode, and the visible light emission from nc-Si is coupled into the whispering gallery mode (WGM) with the light concentrated in the air slot. The WGM resonances are observed via side-photoluminescence setup using a Si charge-coupled device. The feasibility of applying this structure as a biosensor is demonstrated, with an estimated surface sensitivity of 2.8 nm/nm.

Keywords

biosensors; charge-coupled devices; elemental semiconductors; laser cavity resonators; laser modes; micro-optomechanical devices; microfabrication; micromechanical resonators; microsensors; nanolithography; nanophotonics; nanosensors; nanostructured materials; optical fabrication; optical pumping; optical sensors; photoluminescence; semiconductor lasers; silicon; silicon compounds; whispering gallery modes; Si; Si charge-coupled device; Si₃N₄-Si; UV laser diode; WGM resonances; biosensor; concentrated light; deposition; lithography; nanocrystal Si emitting top layer; nc-Si; self-aligned light-emitting layer; side-photoluminescence; silicon nitride horizontal air-slot microdisk resonators; slot-mode; surface sensitivity; top-pumping; visible light emission; whispering gallery mode; Biosensors; microresonators; nanocrystals;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2013.2258333

Filename

6504714