Title :
[Copyright notice]
Abstract :
The following topics are dealt with: MOSFET; hot carriers; nanoelectronics; compound semiconductors; manufacturing reliability; high voltage devices; microelectronic systems; MEMS; failure analysis; thin film devices; device dielectric breakdown; electronics packaging; ESD; photovoltaic devices; integrated circuit interconnection; BEOL dielectrics; flash memory; and circuit reliability.
Keywords :
MOSFET; circuit reliability; electric breakdown; electronics packaging; electrostatic discharge; failure analysis; flash memories; integrated circuit interconnections; integrated circuit manufacture; micromechanical devices; nanoelectronics; thin film devices; BEOL dielectrics; ESD; MEMS; MOSFET; circuit reliability; compound semiconductors; device dielectric breakdown; electronics packaging; failure analysis; flash memory; high voltage devices; hot carriers; integrated circuit interconnection; manufacturing reliability; microelectronic systems; nanoelectronics; photovoltaic devices; thin film devices;
Conference_Titel :
Reliability Physics Symposium (IRPS), 2010 IEEE International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4244-5430-3
DOI :
10.1109/IRPS.2010.5488868