Title :
Fabrication of polymer optical waveguides with integrated micromirrors for out-of-plane surface normal optical interconnects
Author :
Immonen, Milla ; Jianbo Wu ; Kivilahti, J.
Abstract :
In this communication, the fabrication and characterization results of O/E-PWBs comprising multimode polymer waveguides with optical-I/O-coupling facets are presented. The epoxy-based glycidyl ether derivative of bisphenol-A novolac (SU-8) and its refractive index modified grade (L6100) polymers are used as the optical waveguide core and the cladding, respectively. The waveguides with integrated 45° out-of-plane turning micromirrors are fabricated using ultraviolet (UV) lithography. The surface topography and sloping angle characterization using scanning electron microscopy (SEM) showed that 45-degree nearly rectilinear mirror planes were achieved. Parallel waveguide channels with the total-internal-reflection (TIR) are fabricated as an optical-build-up layer on conventional PWBs for functional evaluation. The waveguide transmission loss of the guides with and without the mirror facets is measured using the cut-hack method.
Keywords :
Integrated optics; Micromirrors; Optical device fabrication; Optical interconnections; Optical polymers; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Surface waves; Optical interconnections; board-level optics; micromirrors; optical printed wiring boards; polymer waveguides;
Conference_Titel :
Polymers and Adhesives in Microelectronics and Photonics, 2004. POLYTRONIC 2004. 4th IEEE International Conference on
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-8744-9
DOI :
10.1109/POLYTR.2004.1402762