3D Reconstruction of wear surface from scanning electron microscope combining digital speckle correlation method

A 3D reconstruction of scanning electron microscope (SEM) combining improved digital speckle correlation method (DSCM) was introduced into tool wear investigation. The 3D reconstruction was achieved from SEM stereo-pair by using photogrammetric surveying theory. An indentation with known 3D construction was used to validate the calculating results. The wear loss in tool wear test was calculated by comparing wear surface extracted from SEM stereo-pair to the reference surface which was obtained by fitting the wear surface using least square method. The techniques of energy dispersive X-ray spectroscopy (EDS) and texture mapping were also used in tool wear morphological analysis. The validating test results are well consistent with the principle of constant volume. It is concluded that the SEM 3D reconstruction is reliable on wear observation and shows great advantages in real engineering applications.