Title :
An Embedded Suspended Micromachined Solenoid Inductor
Author :
Zine-El-Abidine, Imed ; Okoniewski, Michal ; McRory, John G.
Author_Institution :
Calgary Univ., Alta.
Abstract :
A novel 3-D fabrication technique is presented to achieve very high quality factor and high inductance values for solenoid inductors. The solenoid inductor is at the same time embedded and suspended. Metal traces are deposited using a single plating step. Measured peak quality factor for the first generation of the device realized on low resistivity silicon substrate is 32. The 1 nH inductor has been fabricated with a one and a half turn solenoid
Keywords :
Q-factor; inductors; micromachining; silicon; solenoids; 3D fabrication technique; embedded suspended micromachined solenoid inductor; metal traces; micromachining; quality factor; single plating step; Etching; Fabrication; Fingers; Inductance; Inductors; Micromachining; Q factor; Resists; Silicon; Solenoids; Inductors; micromachining; microwave circuits;
Conference_Titel :
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-9541-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2006.249391
