Title :
Electromagnetic Investigation on RF Spiral Inductors with Inhomogeneous Patterned Deep-Trench Isolation
Author :
Wane, S. ; Bajon, D.
Author_Institution :
SUPAERO, National High Sch. of Aeronaut., Toulouse
Abstract :
Comprehensive investigations on RF spiral inductors are carried out from electromagnetic analysis using the hybrid TWF method. The effects of deep-trench patterning (DTP) on the quality factor and on substrate coupling are presented. Impacts of different DTP options as well as the influence of buried layers grounding on Q-factor are discussed. Combination of DTP with topological optimization has demonstrated high Q-factor improvement. Comparisons of obtained results with commercial EM tools and with measurement data show satisfactory agreement
Keywords :
Q-factor; buried layers; inductors; isolation technology; Q-factor; RF spiral inductors; deep-trench isolation; deep-trench patterning; electromagnetic analysis; hybrid TWF method; quality factor; substrate coupling; topological optimization; Desktop publishing; Eddy currents; Electromagnetic induction; Energy dissipation; Grounding; Inductors; Q factor; Radio frequency; Spirals; Substrates; Deep-trench Isolation; Eddy Current; RF Inductors; Substrate Coupling; TWF method;
Conference_Titel :
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-9541-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2006.249506
