Title :
Numerical analysis of the effect of geometry on the performance of the Greek cross structure
Author :
Newsam, Mark I. ; Walton, Anthony J. ; Fallon, Martin
Author_Institution :
Dept. of Electr. Eng., Edinburgh Univ., UK
Abstract :
This paper examines the effect that geometry has upon the value of resistivity that is extracted from Greek cross type structures. This work suggests that structure to structure variability of the Greek cross can be reduced through the choice of the appropriate layout
Keywords :
electric resistance measurement; Greek cross structure; geometry; numerical analysis; sheet resistivity measurement; Arm; Buildings; Conductivity; Data mining; Geometry; Numerical analysis; Proximity effect; Size measurement; Testing; Voltage;
Conference_Titel :
Microelectronic Test Structures, 1996. ICMTS 1996. Proceedings. 1996 IEEE International Conference on
Conference_Location :
Trento
Print_ISBN :
0-7803-2783-7
DOI :
10.1109/ICMTS.1996.535655
