DocumentCode :
2716413
Title :
Design and construction of a micromechanical optical actuator
Author :
McKenzie, J.S. ; Clark, C. ; Jones, B.E. ; Jacobs-Cook, A.J.
Author_Institution :
Centre for Manuf. Metrol., Brunel Univ., Uxbridge, UK
fYear :
1995
fDate :
34815
Firstpage :
42552
Lastpage :
42554
Abstract :
Optically powered fluid actuators are under development for use in `control-by-light´ systems including one based on photothermal effects inside a closed cell. The miniaturisation of the converter has been shown to improve the speed of operation of this device substantially, with time constants of the order of tens of milliseconds. Further integration of the various device components in silicon allows for performance improvements which are discussed. This paper focuses on the production and assembly of the multiple-wafer device using a combination of simple micromachining techniques. Some typical experimental results are presented and future developments are discussed
Keywords :
microactuators; micromachining; photothermal effects; Si; control-by-light systems; converter; fluid actuator; integration; micromachining; micromechanical optical actuator; miniaturisation; multiple-wafer device; photothermal effects;
fLanguage :
English
Publisher :
iet
Conference_Titel :
Active Drives for Microengineering Applications, IEE Colloquium on
Conference_Location :
London
Type :
conf
DOI :
10.1049/ic:19950573
Filename :
478162
Link To Document :
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