DocumentCode :
2720075
Title :
Image contrast of THz near-field microscope
Author :
Moon, K. ; Jung, E. ; Lim, M. ; Han, H.
Author_Institution :
POSTECH, Pohang, South Korea
fYear :
2010
fDate :
5-10 Sept. 2010
Firstpage :
1
Lastpage :
2
Abstract :
We present an apertureless THz pulse near field microscopy (THz-NFM) system. Approach curves are obtained for Au films and float-zone Si wafers, and are analyzed by using self-consistent image method (SCIM).
Keywords :
atomic force microscopy; image resolution; microscopes; terahertz wave imaging; terahertz wave spectra; THz near-field microscope; THz-NFM system; apertureless THz pulse near field microscopy system; float-zone silicon wafer; image contrast; self-consistent image method; thin film; Microscopy; Optical microscopy; Scattering; Semiconductor device measurement; Silicon; Substrates; Tungsten;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
Type :
conf
DOI :
10.1109/ICIMW.2010.5613024
Filename :
5613024
Link To Document :
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