DocumentCode :
2722483
Title :
Effect of Oxygen Absorption on Contact Resistance between Metal and Carbon Nano Tubes (CNTs)
Author :
Bing-Yue Tsui ; Chien-Li Weng ; Jeng-Hua Wei ; Ming-Jinn Tsai
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu
fYear :
2006
fDate :
24-26 April 2006
Firstpage :
1
Lastpage :
2
Abstract :
Contact resistance (Rc) between metal and carbon nanotubes (CNTs) is studied extensively. Metal oxide formation at interface due to oxygen absorption plays very important role. Chemically inert metals such as Pt and Au results in the lowest Rc. Adding Ta into Pt can solve the adhesion issue while keeps low Rc . Those metals can break metal oxide and form metal carbide are also preferred
Keywords :
absorption; carbon nanotubes; contact resistance; platinum; tantalum; Pt; Ta; carbon nanotubes; contact resistance; inert metals; metal carbide formation; metal oxide formation; oxygen absorption; Absorption; Adhesives; Carbon nanotubes; Contact resistance; Electron tubes; Gold; Oxygen; Rapid thermal annealing; Testing; Thermal conductivity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, Systems, and Applications, 2006 International Symposium on
Conference_Location :
Hsinchu
ISSN :
1524-766X
Print_ISBN :
1-4244-0181-4
Electronic_ISBN :
1524-766X
Type :
conf
DOI :
10.1109/VTSA.2006.251078
Filename :
4016614
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2722483
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