Title :
Driven structures using piezoelectric coatings
Author :
Noteboom, R. ; Sayer, M. ; Barrow, D.A.
Author_Institution :
Dept. of Phys., Queen´´s Univ., Kingston, Ont., Canada
Abstract :
Flexure mode oscillations in steel membranes at frequencies in the kilohertz range can be induced by piezoelectric coatings. The application of such macroscopic structures in the design of film thickness deposition monitors are demonstrated
Keywords :
membranes; piezoelectric oscillations; piezoelectric thin films; thickness measurement; vibrations; driven macroscopic structure; film thickness deposition monitor; flexure mode oscillation; piezoelectric coating; steel membrane; Biomembranes; Ceramics; Coatings; Damping; Electrodes; Frequency; Piezoelectric films; Steel; Substrates; Vibrations;
Conference_Titel :
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
Conference_Location :
East Brunswick, NJ
Print_ISBN :
0-7803-3355-1
DOI :
10.1109/ISAF.1996.598184
