Title :
Application of Atomic Force Probing on 90nm DRAM Cell Failure Analysis
Author :
Yeh, Yu-Ching ; Lin, Chia-Lung ; Chen, Bi-Jen ; Tseng, Yuan-Wei ; Russell, Jeremy D.
Abstract :
This article presents a novel method to identify marginal faults in DRAM product via atomic force probing. Failing cells which are difficult to be identified by traditional methods were easily localized by current imaging. In addition, current-voltage curves were useful for judging failure root causes
Keywords :
DRAM chips; atomic force microscopy; failure analysis; 90 nm; DRAM failure analysis; atomic force probing; failure root causes; marginal faults; Atomic beams; Atomic force microscopy; Character generation; Failure analysis; Page description languages; Probes; Random access memory; Transistors; Tungsten; Virtual colonoscopy;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2006. 13th International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
1-4244-0205-0
Electronic_ISBN :
1-4244-0206-9
DOI :
10.1109/IPFA.2006.250983
