The design and fabrication of two-dimension multielectrodes array chip and system

We reported a design and fabrication by using microelectro-mechanical-systems (MEMS) processes of a planar 64-channel multielectrode-array (MEA) chip for recording and/or stimulating cells or tissue slice. The 8 multichannels recording system was designed to verify the bioelectronic signal detected from the MEA chip. The active electrode area can be 20 μm×20 μm or 40 μm×40 μm and with 200 μm or 140 μm space between electrodes, and the metal circuit layout is protected by thin silicone dioxide. Then, the DC measurement to prove this MEA chip device can detect bio-electronic signal normally and immersing the MEA chip in the physiological saline buffer solution to verify that the performance in the AC condition.