Micro in-pipe mobile machines by making use of an electro-rheological fluid

In this paper, first, a three-port micro ER valve (φ9.8 mm) is fabricated. Static characteristics of the micro ER valve are examined. The valve can produce load pressure change of 0.25 MPa at maximum electric field strength of 5 kV/mm. Secondly, a micro in-pipe mobile machine with the microvalves is fabricated, whose diameter and length are φ9.8 mm and 34.5 mm respectively. The microvalves control bellows-type microactuators and the in-pipe mobile machine moves like an inchworm. Performances of the in-pipe mobile machine are examined. The maximum average velocity obtained without a load is 0.9 mm/s