Novel Test Structure to emulate Capacitance Variations of a Rate-Grade MEMS Gyroscope

In this paper a novel test structure, which emulates the capacitance variation of a MEMS gyroscope is presented. The rotational rate of the gyroscope is taken as an electrical signal which is converted into capacitance variations, that can be sensed by the sensor electronics. The continuous angular variations are converted into sampled capacitance changes proportional to the rotational rate. This obviates the need for multi-domain simulations and subsequently the multiple domain testing to validate the design of sensor electronics of the gyroscope. This helps in reducing the time to market and long product development cycles. The test structures are prototyped using 1.5mum technology and are validated using a novel charge/discharge technique which measures a minimum capacitance change of 5fF