Title :
CAESAR: a virtual IC factory in an undergraduate semiconductor device fabrication laboratory
Author :
Asenov, A. ; Stanley, C.R.
Author_Institution :
Dept. of Electron. & Electr. Eng., Glasgow Univ., UK
Abstract :
In this paper we have summarised our experiences from the introduction of process and device simulation within the CAESAR framework into an undergraduate semiconductor device fabrication laboratory. We have found that this innovative step is well received by the students. The simulations benefit them in the learning process and provide practical experience and confidence in using simulation tools
Keywords :
CAD; electronic engineering education; semiconductor device models; semiconductor process modelling; student experiments; CAESAR; TCAD; device simulation; process simulation; semiconductor device fabrication; undergraduate laboratory; virtual IC factory;
Conference_Titel :
Physical Modelling of Semiconductor Devices, IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19950435
