Title :
The mechanical behavior investigation of MEMS switches for millimeter wave phase shifters
Author :
He, Xun-jun ; Wu, Qun ; Jin, Bo-shi ; Song, Ming-Xin ; Yin, Jing-Hua
Author_Institution :
Harbin Inst. of Technol., Harbin
Abstract :
In this paper, a novel low spring constant hinge beam structure is presented in order to reduce the driven-voltage of switch. The mechanical behaviors of switches are investigated using the IntelliSuiteTM tool. The simulation results show that the driven voltage of 2.5V and the time response of 30us are obtained respectively. Moreover, the frequencies of all mechanical vibrant modes of beam are higher than 15 kHz.
Keywords :
microswitches; millimetre wave phase shifters; IntelliSuite tool; MEMS switches; driven-voltage; hinge beam structure; low spring constant; mechanical behavior; millimeter wave phase shifters; time 30 mus; voltage 2.5 V; Delay; Fasteners; Microswitches; Millimeter wave technology; Millimeter wave transistors; Phase shifters; Radiofrequency microelectromechanical systems; Switches; Time factors; Voltage;
Conference_Titel :
Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0400-2
Electronic_ISBN :
1-4244-0400-2
DOI :
10.1109/ICIMW.2006.368443
