DocumentCode :
2739350
Title :
Optical Power Handling and Thermal Cycling of Optical MEMS
Author :
Spahn, Olga Blum ; Phinney, Leslie M. ; Wong, C. Channy ; Cowan, William D. ; Grossetete, Grant D. ; Adams, David P.
Author_Institution :
Sandia Nat. Labs., L&M Technol., Albuquerque, NM
fYear :
2008
fDate :
18-21 Aug. 2008
Firstpage :
437
Lastpage :
438
Abstract :
A number of applications require optical MEMS devices to handle high optical power or thermal variations. We present theoretical and experimental results for SUMMiTTM fabricated mirrors and other structures that illustrate performance limitation and various means of addressing them.
Keywords :
aluminium alloys; copper alloys; elemental semiconductors; integrated optics; micro-optomechanical devices; mirrors; silicon; SUMMiT fabricated mirrors; Si-AlCu; optical MEMS; optical power handling; thermal cycling; Gold; Heating; Laser theory; Metallization; Micromechanical devices; Mirrors; Optical devices; Optical interferometry; Optical surface waves; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2008. NANO '08. 8th IEEE Conference on
Conference_Location :
Arlington, Texas
Print_ISBN :
978-1-4244-2103-9
Electronic_ISBN :
978-1-4244-2104-6
Type :
conf
DOI :
10.1109/NANO.2008.133
Filename :
4617115
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2739350
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