Title :
Photoplastic NEMS with an Encapsulated Polysilicon Piezoresistor
Author :
Kale, Nitin S. ; Nag, Sudip ; Pinto, R. ; Rao, Ramgopal V.
Author_Institution :
Centre for Nanoelectron., IIT Bombay, Mumbai
Abstract :
We demonstrate a photoplastic NEMS device that has an encapsulated polysilicon piezoresistor. The crucial temperature limitation of depositing a polysilicon film on a polymer was overcome by employing a novel Hotwire CVD process. In this paper, we report the fabrication and characterization of a novel polymeric cantilever with an embedded piezoresistor, which exploits the low Youngs modulus of a polymer and high gauge factor of polysilicon. Such devices are widely used for sensing biochemicals.
Keywords :
cantilevers; nanotechnology; piezoresistive devices; resistors; chemical vapour deposition; embedded piezoresistor; encapsulated polysilicon piezoresistor; hotwire CVD process; low Youngs modulus; photoplastic NEMS device; polymeric cantilever; polysilicon film; Biomedical optical imaging; Electrical resistance measurement; Fabrication; Nanoelectromechanical systems; Optical refraction; Optical sensors; Optical variables control; Piezoresistance; Plasma temperature; Polymers;
Conference_Titel :
Nanotechnology, 2008. NANO '08. 8th IEEE Conference on
Conference_Location :
Arlington, TX
Print_ISBN :
978-1-4244-2103-9
Electronic_ISBN :
978-1-4244-2104-6
DOI :
10.1109/NANO.2008.140
