Title :
Automatic Tool Changer for SPMs
Author :
Neitzel, Mattias ; Schmucker, Ulrich ; Zubtsov, Mikhail
Author_Institution :
Fraunhofer Inst. for Factory Oper. & Autom., Magdeburg
Abstract :
Our research encompasses improvements in SPM instrumentation needed for rapid automated change of nano- working tools like cantilever chips or grippers in the immediate region of SEM or FIB field of view. The major challenges are utmost precision working-tool positioning, repeatable clamping of the tool and placing the working-part in the same point after tool´s change, and devising a design which will not incapacitate SEM or FIB for work. The communication presents an entirely new approach with the promise to meet these demands.
Keywords :
focused ion beam technology; machine tools; nanotechnology; scanning electron microscopy; scanning probe microscopy; self-assembly; FIB field of view; SEM field of view; SPM instrumentation; automatic tool changer; cantilever chips; grippers; nanoworking tools; precision working-tool positioning; rapid automated change; repeatable tool clamping; Atomic force microscopy; Chemical processes; Clamps; Force measurement; Nanoparticles; Nanostructures; Production; Robotic assembly; Scanning electron microscopy; Scanning probe microscopy;
Conference_Titel :
Nanotechnology, 2008. NANO '08. 8th IEEE Conference on
Conference_Location :
Arlington, TX
Print_ISBN :
978-1-4244-2103-9
Electronic_ISBN :
978-1-4244-2104-6
DOI :
10.1109/NANO.2008.253
