SAW propagation characteristics and fabrication technology of piezoelectric thin film/diamond structure

Author

Yamanouchi, K. ; Sakurai, N. ; Satoh, T.

Author_Institution

Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan

fYear

1989

fDate

3-6 Oct 1989

Firstpage

351

Abstract

The authors report a theoretical analysis of the surface-acoustic wave (SAW) propagation characteristics of ZnO/diamond and AlN/diamond structures. The analysis shows about 12000 m/s and a large electromechanical coupling coefficient K² of 0.03 for AlN thin film. The numerical analysis for the ZnO/diamond structure shows that there exists a coupling between the Rayleigh wave and the Sezawa wave at H/λ=0.2 and a complex dependency of K ² on the thickness of ZnO film. The fabrication process of synthetic-diamond thin films is described, and experimental results on the SAW propagation characteristics are presented. With the thermal filament CVD (chemical vapor deposition) method, it is possible to obtain a diamond film on a Si substrate, but the surface of it is rough, and polishing is needed to make a fine pattern on it

Keywords

acoustic wave propagation; piezoelectric devices; surface acoustic waves; AlN/diamond; Rayleigh wave; SAW propagation; Sezawa wave; ZnO/diamond; electromechanical coupling coefficient; fabrication process; piezoelectric thin film/diamond structure; synthetic-diamond thin films; thermal filament CVD; Chemical vapor deposition; Fabrication; Numerical analysis; Rough surfaces; Semiconductor films; Substrates; Surface acoustic waves; Surface waves; Transistors; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1989. Proceedings., IEEE 1989

Conference_Location

Montreal, Que.

Type

conf

DOI

10.1109/ULTSYM.1989.67007

Filename

67007