• DocumentCode
    2745841
  • Title

    A Low-stress Trench Isolation Structure And Its Electrical Characteristics Of Sub 20 Ps High-speed ECL

  • Author

    Matsuda, S. ; Itoh, N. ; Nakajima, H. ; Inou, K. ; Iinuma, T. ; Yoshino, C. ; Tsuboi, Y. ; Katsumata, Y. ; Iwai, H. ; Hafa

  • Author_Institution
    Toshiba Corporation
  • fYear
    1993
  • fDate
    17-19 May 1993
  • Firstpage
    73
  • Lastpage
    74
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
  • Conference_Location
    Kyoto, Japan
  • Type

    conf

  • DOI
    10.1109/VLSIT.1993.760251
  • Filename
    760251
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2745841