مرکز منطقه ای اطلاع رساني علوم و فناوري - An Integrated Isolation/Gate Process For Sub-quarter Micron Technologies

DocumentCode :

2746495

Title :

An Integrated Isolation/Gate Process For Sub-quarter Micron Technologies

Author :

Kangar ; Hillenius ; Baker, M.R. ; Nakahara, S. ; Chang, C.P. ; Chong-Cheng Fu ; Fritzinger, L.B. ; Giniecki, L.

Author_Institution :

AT&T Bell Laboratories

fYear :

1993

fDate :

17-19 May 1993

Firstpage :

141

Lastpage :

142

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location :

Kyoto, Japan

Type :

conf

DOI :

10.1109/VLSIT.1993.760288

Filename :

760288

Link To Document :