Title :
Displacement sensor for detecting sub-micrometer motion
Author :
Avramov-Zamurovic, Svetlana ; Yoo, Jae Myung ; Dagalakis, Nicholas G. ; Lee, Rae Duk
Author_Institution :
United States Naval Acad., Annapolis, MD, USA
Abstract :
This paper describes a design of a displacement sensor that detects motion of a platform by measuring change in capacitance due to the fringing electric field. Several variations of the sensor´s design were simulated to establish performance sensitivity and the simulation results are presented. Proof of concept testing was performed and encouraging outcomes were recorded. The sensor was able to detect motion of a platform with resolution of 100 nm or better at the distance of several micrometers.
Keywords :
capacitance measurement; displacement measurement; microsensors; displacement sensor; fringing electric field; performance sensitivity; proof of concept testing; size 100 nm; submicrometer motion detection; Capacitance; Capacitance measurement; Conductors; Displacement measurement; Electrodes; Sensitivity; Wires; Capacitance measurement; displacement measurement; nano-size positioners; nanotechnology; sensitivity;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM), 2012 Conference on
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4673-0439-9
DOI :
10.1109/CPEM.2012.6251001