Title :
Direct Drive Rotary Servomotor for Semiconductor Applications
Author :
Yuan-Jiang, Liu ; Qixin, Zhu ; Yan, Ho Siu ; Widdowson, Gary P.
Author_Institution :
ASM Assembly Autom. Ltd, Hong Kong
Abstract :
This paper describes the design methodology for a direct drive rotary servo system. The optimisation and coupling between the thermal, mechanical and electromagnetic properties are investigated. The simulated and experimental results are in close agreement. The motion performance is also presented
Keywords :
couplings; electromagnetic coupling; mechanical properties; motor drives; rotors; servomotors; thermal properties; direct drive rotary servomotor; electromagnetic property; mechanical property; semiconductor applications; thermal property; Design engineering; Design methodology; Electromagnetic coupling; Hysteresis motors; Magnetic analysis; Magnetostatics; Reluctance motors; Servomechanisms; Servomotors; Torque;
Conference_Titel :
Mechatronics, 2006 IEEE International Conference on
Conference_Location :
Budapest
Print_ISBN :
0-7803-9712-6
Electronic_ISBN :
0-7803-9713-4
DOI :
10.1109/ICMECH.2006.252504
