DocumentCode :
2751482
Title :
Increased surface ordering of InAs island arrays using a multidot column subsurface structure
Author :
Komarov, S.A. ; Solomon, G.S. ; Harris, J.S., Jr.
Author_Institution :
Solid State Electron. Lab., Stanford Univ., CA, USA
fYear :
1997
fDate :
8-11 Sep 1997
Firstpage :
535
Lastpage :
538
Abstract :
We report experimental evidence of improved in-plane self-organization resulting from vertically stacked self-assembled InAs islands in a GaAs matrix. Samples under investigation were grown by molecular beam epitaxy in Stranski-Krastamow growth mode and consisted of one, five, ten, and twenty layers of coherently strained islands of InAs with all but the last layers covered with GaAs. We have studied atomic force microscope images of the sample surface morphology and performed real space, as well as Fourier space image processing. Along with the evolution of island size and long range surface roughness, we clearly observe the onset of in-plane island ordering with stacking
Keywords :
III-V semiconductors; atomic force microscopy; indium compounds; island structure; molecular beam epitaxial growth; semiconductor epitaxial layers; semiconductor growth; semiconductor quantum dots; surface topography; Fourier space image processing; GaAs; InAs; InAs island arrays; Stranski-Krastamow growth mode; atomic force microscope images; improved in-plane self-organization; increased surface ordering; island size; long range surface roughness; molecular beam epitaxy; multidot column subsurface structure; real space image processing; sample surface morphology; vertically stacked self-assembled InAs islands; Atomic force microscopy; Atomic layer deposition; Gallium arsenide; Image processing; Laboratories; Molecular beam epitaxial growth; Rough surfaces; Surface morphology; Surface roughness; US Department of Transportation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Compound Semiconductors, 1997 IEEE International Symposium on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7503-0556-8
Type :
conf
DOI :
10.1109/ISCS.1998.711733
Filename :
711733
Link To Document :
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