The effects of ionizing radiation on SAW resonators

Author

Hines, J.H. ; Stapor, W.J.

Author_Institution

US Naval Res. Lab., Washington, DC, USA

fYear

1990

fDate

4-7 Dec 1990

Firstpage

471

Abstract

SAW resonators with frequencies ranging from 199 MHz to 746 MHz were fabricated and exposed to sequentially increasing total doses of various types of ionizing radiation, and the effects were observed. The substrates used were air-swept and as-grown (nonswept) 40° Y-rotated quartz, LST-quartz, and nonswept 40° Y-rotated quartz coated with a 400-Å-thick layer of SiO_x. The total doses used range from 1 kRad(Si) to 10 MRad(Si), and the radiation types tested were Co-60 gamma, high energy electron (β), proton, and heavy ion (Si-28, Cl-35, Ge-74, and Au-197) radiation. The measurement results show a distinct difference in the radiation sensitivity of SAW device performance parameters based on the substrate used. The effects of the passivating SiO_x layer were also interesting, since the coated devices exhibited significantly smaller radiation-induced changes than those without the coating

Keywords

crystal resonators; electron beam effects; gamma-ray effects; ion beam effects; proton effects; surface acoustic wave devices; 10³ to 10⁷ rad; 199 to 746 MHz; LST-quartz; SAW resonators; SiO₂; Y-rotated quartz; electron irradiation; gamma irradiation; heavy ion irradiation; ionizing radiation; passivating SiO_x layer; proton irradiation; radiation sensitivity; Coatings; Electrons; Ionizing radiation; Laboratories; Material properties; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Testing; Thermal conductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1990. Proceedings., IEEE 1990

Conference_Location

Honolulu, HI

Type

conf

DOI

10.1109/ULTSYM.1990.171410

Filename

171410